Previous work has demonstrated the potential of polytetrafluoroethylene (PTFE) thin films for ULSI applications. The films are deposited from PTFE nanoemulsions. They have an ultra-low dielectric constant of 1.7 to 2.0, a leakage current of less than 1.0 nA/cm2 @ 0.2 MV/cm and a dielectric strength of from 0.5 to 2.4 MV/cm. They are thermally stable (isothermal weight loss < 1.0 %/hr at 450 °C), uniform (thickness standard deviation < 2%), and have excellent gap-fill properties (viscosity of 1.55 cP and surface tension of 18 mN/m). The films are inert with respect to all known semiconductor process chemicals, yet they are easily etched in an oxygen plasma.This paper discusses the processing technology that has been developed to process PTFE films with these properties. Specifically, it addresses two recent discoveries: 1) Good adhesion of spin-coated PTFE to SiO2 surfaces; and 2) high dielectric strength of PTFE thin films spin-coat deposited onto rigid substrates. The adhesion-promoting and thermal treatments necessary to produce these properties are detailed. Stud pull test results and test results from metal-insulator-metal (MIM) capacitor structures are given.

This article aims to present an application of statistical process control (CEP) in an agribusiness company, located in the state of Rio Grande do Sul, which is an international benchmark in its segment. Therefore, we performed a case study, using the documentary research and semi-structured interviews to collect data. More specifically, initially determined through a theoretical study, the main approaches concerning the proposed theme, which were the statistical quality control (CEQ), CEP, control charts, histograms, potential capacity of the process (CP) and actual capacity of the process (CPK), and then present based on documentary research and semi-structured interviews, the application of CEP considered. How majors search results, it is noteworthy that it was possible to present the proposed application for the item AH225962 considered, allowing to understand the importance of a correct application of the CEP tool, to ensure quality of products, the agribusiness company considered. It is expected that the learning from this study contribute in the dissemination of experiences and practices of using CEP from real situations, companies that are a benchmark in its segment.

No abstract