Tungsten-carbide (W-C) nanowires have been deposited by focused-ion-beam chemical vapor deposition (FIB-CVD). Mixtures of C14H10 and W(CO)6 are used as precursors. For certain precursor ratios, our nanowires become superconducting with a T
c as high as 5.8 K. Also, freestanding W-C nano pillars were grown by FIB-CVD. The growth rate of the deposition from the mixture is at most 4.25 times higher than W(CO)6 is used as the precursor. This growth rate greatly facilitates the fabrication of three-dimensional superconducting structures.
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