Liquid level detection using piezoelectric actuators and sensors is superior to other technologies in accuracy, stability, and durability. In the semiconducting industry, the accurate detection of precursor levels in a canister is directly connected to the quality of the atomic layer growth through chemical vapor deposition and atomic layer deposition processes. However, the sensitivity of the level detection using piezoelectric devices often decreases at a specific temperature range, limiting the wide temperature operation of the canister. We demonstrate decreased sensitivity of the piezoelectric sensors due to a change in detuning frequency by temperature. A model with a simple harmonic oscillator exhibits the fundamental behavior of the actuator amplitude after a finite number of driving pulses. The impedance measurement of a sensor assembly demonstrated a significant shift in the primary resonance frequency due to a change in environmental temperature. By analyzing the simulation data, we established a temperature-dependent number of driving pulses that could extend the operating temperature of the piezoelectric actuators, which can easily be applied to a wide temperature operation for a canister.
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