Thermal phonon transport in silicon nanowires (Si NWs) and two-dimensional phononic crystal (2D PnC) nanostructures was investigated by measuring thermal conductivity using a micrometer-scale time-domain thermoreflectance. The impact of nanopatterning on thermal conductivity strongly depends on the geometry, specularity parameter, and thermal phonon mean free path (MFP) distribution. Thermal conductivities for 2D PnC nanostructures were found to be much lower than that for NWs with similar characteristic length and surface-to-volume ratio due to stronger phonon back scattering. In single-crystalline Si, PnC patterning has a stronger impact at 4 K than at room temperature due to a higher specularity parameter and a longer thermal phonon MFP. Nanowire patterning has a stronger impact in polycrystalline Si, where thermal phonon MFP distribution is biased longer by grain boundary scattering.
Thermal phonon transport in square-and triangular-lattice Si phononic crystal (PnC) nanostructures with a period of 300 nm was investigated by measuring the thermal conductivity using micrometer-scale time-domain thermoreflectance. The placement of circular nanoholes has a strong influence on thermal conductivity when the periodicity is within the range of the thermal phonon mean free path. A staggered hole structure, i.e., a triangular lattice, has lower thermal conductivity, where the difference in thermal conductivity depends on the porosity of the structure. The largest difference in conductivity of approximately 20% was observed at a porosity of around 30%.This crystal structure dependent thermal conductivity can be understood by considering the local heat flux disorder created by a staggered hole structure. Numerical simulation using the Monte Carlo technique was also employed and also showed the lower thermal conductivity for a triangular lattice structure. Besides gaining a deeper understanding of nanoscale thermal phonon transport, this information would be useful in the design of highly efficient thermoelectric materials created by nanopatterning.
Thermal phonon transport in single-crystalline Si, amorphous SiGe, and poly-SiGe nanostructures was investigated experimentally at room temperature. The characteristic length dependence of thermal conductivity was compared across these three materials by changing the shortest distance between the circular holes of phononic crystals formed in the membranes. The dependences clearly differ for these materials, and these differences can be explained by the thermal phonon mean free path spectra of the three materials. Nanostructuring has a larger impact on thermal conductivity reduction when the characteristic length is comparable to that in the region where the thermal phonon mean free path spectrum is dense. The results suggest that thermal phonon mean free path spectra can be estimated qualitatively by thermal conductivity measurements with characteristic length sweeps.
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