We investigate the characteristics of thermally annealed ZnO nanotip in various ambient. AZO seed layer was first prepared on glass substrate by RF sputtering. A vertically oriented ZnO nanotip array was grown on AZO seed layer/glass by chemical bath deposition with precursors of zinc nitrate and ammonia at 70 °C. By thermal annealing in N2O ambient at 300 °C for 1 hour, the characteristics of ZnO nanotip array were improved and the ultraviolet sensor shows the best rise time of 50 s, decay time of 70 s and on/off current ratio of 26.04.