The needs of microelectronics for heat removal are growing and have already exceeded the value of 1 kW/cm2. To assess the ability of jet impingement cooling to meet the growing requirements, a review of experimental studies was conducted. The review demonstrated both the lack of progress in increasing critical heat flux value over the past 30 years, and the fact that this technique is still considered effective and promising. The review showed that the movement to intensify heat transfer is in the same direction as in other promising cooling technologies. It is noted that the most productive heat transfer occurs in the region of the thinnest liquid film spreading from a free impingement liquid jet. New fundamental studies are discussed that note the significance of heat transfer values in a very thin liquid film, and this is important for the development of cooling technologies. Problems are formulated for the required detailed studies of highly dynamic processes in the boiling region of an ultrafine liquid film at the micro level, aimed at intensifying heat transfer.

The present research is devoted to the evaporation of micro-sized water droplets on a smooth silicon substrate heated from below. The study of this process is relevant for the development of spray cooling systems. Due to the extreme complexity of this phenomenon the mechanism of spray cooling is not fully understood yet. In our experiment the silicon substrate is open to the atmosphere. Evaporation of sessile droplets with the size of the order of 10 μm is studied at the substrate temperature ranging from 23 to 100°C. A shadow method coupled with a high-speed camera is used in the experiment to determine the geometric characteristics of the droplet profile and to calculate the droplet evaporation rate.

The present work is devoted to the study of the evaporation process of micro-sized water droplets levitating over a heated dry substrate. The study of this process is relevant in connection with the development of spray cooling systems. Due to the extreme complexity of this phenomenon the mechanism of spray cooling is still not fully understood. In this work we studied the evaporation of micro-sized water droplets levitating over a dry substrate heated from below. The working area was open to the atmosphere. Evaporation was studied in the temperature substrate range from 23 to 95°C. During the experiment local values of the substrate temperature and geometric characteristics of the drop were determined. In the experiment a shadow method with high spatial resolution was used, shooting was performed with a high-speed camera.