Scanning SQUID microscopy has been extended to record current-induced magnetic field maps of superconductor topologies based on YBCO film structures. The technique described can be used as a powerful tool for the diagnostics of superconductor integrated circuits and highly sensitive bolometers. This kind of diagnostics predicts the degree of integration which can be achieved at the modern level of HTSC microelectronics technology. One would expect an overall yield of 100-element chips at a level of in the production of superconducting YBCO/MgO bolometers.

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