As is well known, it is not so easy to operate a conventional transmission electron microscope for observation of magnetic materials. The reason is that the instrument requires re-alignment of the axis and re-correction of astigmatism after each specimen shift, as the lens field is greatly disturbed by the specimen. With a conventional electron microscope, furthermore, it is impossible to observe magnetic domains, because the specimen is magnetized to single orientation by the lens field. The above mentioned facts are due to the specimen usually being in the lens field. Thus, special techniques or systems are usually required for magnetic material observation (especially magnetic domain observation), for example, the technique to switch off the objective lens current and Lorentz microscopy. But these cannot give high image quality and wide magnification range, and furthermore Lorentz microscopy is very complicated.

In the observation of a thick specimen by means of a transmission electron microscope, the intensity of electrons passing through the objective lens aperture is greatly reduced. So that the image is almost invisible. In addition to this fact, it have been reported that a chromatic aberration causes the deterioration of the image contrast rather than that of the resolution. The scanning electron microscope is, however, capable of electrically amplifying the signal of the decreasing intensity, and also free from a chromatic aberration so that the deterioration of the image contrast due to the aberration can be prevented. The electrical improvement of the image quality can be carried out by using the fascionating features of the SEM, that is, the amplification of a weak in-put signal forming the image and the descriminating action of the heigh level signal of the background. This paper reports some of the experimental results about the thickness dependence of the observability and quality of the image in the case of the transmission SEM.

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There is now a progress in the imaging of crystal defects in the STEM. The image contrast of the defects in the STEM depends on the diffraction condition as similarly in the CTEM. There is, however, a significant difference between CTEM and STEM; the aperture angle of illuminating beam in the latter is quite large. In this report, the relationship between the STEM image and the following conditions was extensively studied with a scanning transmission electron microscope JSEM-200 equipped with a side entry goniometer at 200kV; illuminating angle (2αi), collecting angle (2αc) and positioning θc of an aperture selecting an angular direction of a diffraction spot.

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