Photoresponse characteristics of polycrystalline ZnO films prepared by the unbalanced magnetron sputtering technique have been analyzed for ultraviolet photodetector applications. Changes in the crystallographic orientation and the microstructure of the films due to in situ bombardment effects during film growth have been studied. Variations in photoresponse are correlated with the observed changes in the optical properties and the defect concentration in the films. ZnO films with (100) and (101) orientation possessing a small grain size exhibited a slow response with a rise time=1.99 s, whereas porous ZnO films with a mixed orientation (100), (002), and (101) and a larger grain size exhibited a fast response speed with a rise time=792 ms. The influence of trap levels on the slow and fast rising components of the photoresponse characteristics and the origin for a fast and a stable response have been identified. A slow rise in the photocurrent directly relates to the adsorption and desorption of oxygen on the film surface, and the fast rise is due to a bulk-related phenomena involving embedded oxygen. The magnitude of the photocurrent and the rise time are found to decrease considerably with increasing number of trap levels.

CuO nanoparticles on sputtered SnO2 thin-film surface exhibit a fast response speed (14 s) and recovery time (61 s) for trace level (20 ppm) H2S gas detection. The sensitivity of the sensor (S∼2.06×103) is noted to be high at a low operating temperature of 130 °C. CuO nanoparticles on SnO2 allow effective removal of excess adsorbed oxygen from the uncovered SnO2 surface due to spillover of hydrogen dissociated from the H2S–CuO interaction.

Cholesterol oxidase (ChOx) has been immobilized onto zinc oxide (ZnO) nanoporous thin films grown on gold surface. A preferred c-axis oriented ZnO thin film with porous surface morphology has been fabricated by rf sputtering under high pressure. Optical studies and cyclic voltammetric measurements show that the ChOx∕ZnO∕Au bioelectrode is sensitive to the detection of cholesterol in 25–400mg∕dl range. A relatively low value of enzyme’s kinetic parameter (Michaelis-Menten constant) ∼2.1mM indicates enhanced enzyme affinity of ChOx to cholesterol. The observed results show promising application of nanoporous ZnO thin film for biosensing application without any functionalization.

The stabilities of Pt/Ti bilayer metallizations in an oxidizing atmosphere have been investigated with several thicknesses of interfacial Ti-bonding layers. Reactions in the Pt/Ti/SiO 2 /Si interface were examined as a function of various annealing conditions in the temperature range 200-800°C by using Rutherford backscattering spectrometry, Auger electron spectroscopy, x-ray diffraction, and transmission electron microscopy. Thermal treatment in oxygen was found to cause rapid oxidation of the Ti layer, accompanied by the migration of Ti into the Pt film. Diffusion of oxygen through the Pt grain boundaries was mainly responsible for the adverse reactions at the interface and loss of mechanical integrity. Thin Ti (10 nm) layers resulted in the depletion of the interfacial bonding layer causing serious adhesion problems, whereas thicker Ti films (100 nm) caused the formation of TiO 2-x in the Pt-grain boundaries, ultimately encapsulating the Pt surface with an insulating TiO 2 layer. Improved stability and adhesion in the Pt/Ti bilayer metallization compatible with ferroelectric thin film processing, were achieved by incorporating well reacted thin TiO 2 , layers in situ, and depositing Pt films at a high temperature.

H 2 S gas interaction mechanisms of sputtered SnO2 and SnO2–CuO bilayer sensors with a varying distribution of the Cu catalyst on SnO2 are studied using Pt interdigital electrodes within the sensing film. Sensitivity to H2S gas is investigated in the range 20–1200 ppm. Changes induced on the surface, the SnO2–CuO interface, and the internal bulk region of the sensing SnO2 film upon exposure to H2S have been analyzed to explain the increasing sensitivity of three different sensors SnO2, SnO2–CuO, and SnO2 with CuO islands. SnO2 film covered with 0.6 mm diameter ultrathin (∼10 nm) CuO dots is found to exhibit a high sensitivity of 7.3×103 at a low operating temperature of 150 °C. A response speed of 14 s for 20 ppm of H2S, and a fast recovery time of 118 s in flowing air have been measured. The presence of ultrathin CuO dotted islands allow effective removal of adsorbed oxygen from the uncovered SnO2 surface due to spillover of hydrogen dissociated from the H2S–CuO interaction, and the spillover mechanism is sensed through the observed fast response characteristics, and the high sensitivity of the SnO2–CuO-dot sensor.