The traveling-wave ultrasonic motor (TUSM) drive offers many distinct advantages but suffers from severe system nonlinearities and parameter variations especially during speed control. This paper presents a new speed tracking control system for the TUSM drive, which newly incorporates neuro-fuzzy control and direct pulse width modulation to solve the problem of nonlinearities and variations. Increasingly, the proposed control system is digitally implemented by a low-cost digital signal processor (DSP) based microcontroller, hence reducing the system hardware size and cost. Experimental results confirm that the proposed speed tracking controller can offer good steadystate and transient performances.
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