An in-line slot waveguide sensor built in a polished flat platform of a D-shaped silicon cored fiber with a taper coupled region is proposed and investigated thoroughly. Simulation results show that the single-mode light field sustained in the silicon cored fiber can be efficiently transferred to the slot waveguides through the tapered region. The geometry parameters of the slot waveguide sensors are optimized to have the corresponding highest power confinement factors and the resultant sensor sensitivities. The three-slot waveguide sensor is found to have the best performance among one-, two- and three-slot waveguides at the mid-IR wavelength.

This paper introduces a fully integrated millimeter scale power source based on a micro-silicon fuel cell and a MEMS hydrogen generator. The integrated devices are fabricated from silicon wafers using conventional MEMS fabrication processes. In this design, hydrolysis reaction of calcium hydride and water is used to generate hydrogen and the hydrogen generation rate is controlled by a microfluidic self-regulating mechanism, which can control the hydrolysis reaction based on the load. Design, fabrication, and testing results of a prototype system are described. One of the devices can produce 90 μW for 6 hrs with a maximum power of 0.17 mW, and another one can produce 30 μW for 26 hours with a total energy density of 100 Whr/L.