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Two low-firing BiMVO 5 (M = Ca, Mg) ceramics were prepared in the sintering temperature range of 760-850°C. Their differences in phase formation, sintering behavior, and dielectric performances were investigated. BiCaVO 5 formed a single phase with an orthorhombic structure, while BiMgVO 5 crystallized in a monoclinic structure that needs longer dwelling time to obtain single phase. The optimized microwave dielectric properties were obtained with ε r = 15.70, Q × f = 55 000 GHz (at 10.6 GHz), and τ f = −71 ppm/°C for BiCaVO 5 , ε r = 18.55, Q × f = 86 860 GHz (at 9.63 GHz), and τ f = −65 ppm/°C for BiMgVO 5 . In addition, the large negative τ f values of BiMVO 5 (M = Ca, Mg) ceramics were successfully adjusted by forming composite ceramics with CaTiO 3 and near-zero τ f values of +2 ppm/°C and −3 ppm/°C were obtained in 0.92BiCaVO 5 -0.08CaTiO3 and 0.94BiMgVO 5 -0.06CaTiO 3 , respectively. Both ceramics exhibited good chemical compatibility with Ag electrode. The results demonstrate BiMVO 5 (M = Ca, Mg) ceramics to be attractive candidates in LTCC technology. K E Y W O R D SBiMVO 5 , ceramics, low temperature co-fired ceramics, microwave dielectric properties

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