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A new type all optical vibration and acceleration sensor using the combination of micromachined Si cantilever and optical fiber is proposed, and its fundamental characteristics are demonstrated. The light emitted from bulb-lens set into the V-groove is reflected at the reflector formed on the Si cantilever and then recoupled into the bulb-lens. Several sensors with different length (0.64–6.0 mm long) of the Si cantilever are fabricated to compare the theoretical resonance frequency fr obtained from the simple model and experimental ones. They had good agreement. From the sensing principle the sensing frequency range of the vibration is suitable below the fr of the Si cantilever of the sensor.

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The author presents a thermal conductivity absolute humidity sensor whose substrate and its channel can be heated. Water droplets getting into the channel due to condensation can be removed by the substrate heater and the bridge heater setting in the channel. Thus this sensor is expected to be applied in condensation environment, such as a humidity sensor for medical ventilator. The output voltage from the prototype platinum hot wire sensor is stably obtained by using the pulse current waveform from the programmable current source under the conditions of 100%RH and 33 • C. K E Y W O R D Scondensation environment, hot wire, humidity sensor, microheater, thermal conductivity sensor, ventilator Electron Comm Jpn. 2018;101:45-51.