Atomically thin molybdenum disulfide (MoS) is an ideal semiconductor material for field-effect transistors (FETs) with sub-10 nm channel lengths. The high effective mass and large bandgap of MoS minimize direct source-drain tunneling, while its atomically thin body maximizes the gate modulation efficiency in ultrashort-channel transistors. However, no experimental study to date has approached the sub-10 nm scale due to the multiple challenges related to nanofabrication at this length scale and the high contact resistance traditionally observed in MoS transistors. Here, using the semiconducting-to-metallic phase transition of MoS, we demonstrate sub-10 nm channel-length transistor fabrication by directed self-assembly patterning of mono- and trilayer MoS. This is done in a 7.5 nm half-pitch periodic chain of transistors where semiconducting (2H) MoS channel regions are seamlessly connected to metallic-phase (1T') MoS access and contact regions. The resulting 7.5 nm channel-length MoS FET has a low off-current of 10 pA/μm, an on/off current ratio of >10, and a subthreshold swing of 120 mV/dec. The experimental results presented in this work, combined with device transport modeling, reveal the remarkable potential of 2D MoS for future sub-10 nm technology nodes.

The use of two organometallic reagents, di-rrbutylmagnesium and magnesium bis(2,6-di-tert-butylphenoxide) for the intercalation of magnesium into a range of solid hosts is investigated. New magnesium intercalation compounds based on cubic and layered TiS, are described.

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A sacrificial-post templating method is presented for directing block copolymer self-assembly to form nanostructures consisting of monolayers and bilayers of microdomains. In this approach, the topographical post template is removed after self-assembly and therefore is not incorporated into the final microdomain pattern. Arrays of nanoscale holes of different shapes and symmetries, including mesh structures and perforated lamellae with a bimodal pore size distribution, are produced. The ratio of the pore sizes in the bimodal distributions can be varied via the template pitch, and agrees with predictions of self consistent field theory.