No abstract

It is well known that semiconductor gas sensor characteristics may change when exposed to siloxane vapor. In this study, we examined filter materials to improve the siloxane durability of the LP gas sensor. Adsorption isotherms of octamethylcyclotetrasiloxane (D4) at 298 K were measured for each filter materials. As a result, γ-Al 2 O 3 showed high performance in adsorption amount. However, the sensor with mixed filter materials of MPR-PEG (Mordenite zeolite modified with polyethylene glycol) and γ-Al 2 O 3 was more stable after the D4 durability test than the sensors with the single filter materials. The γ-Al 2 O 3 mixed with MOR-PEG maintains capacity for D4.