Optical thickness is a fundamental characteristic of an optical component. A measurement method combining discrete Fourier-transform (DFT) analysis and a phase-shifting technique gives an appropriate value for the absolute optical thickness of a transparent plate. However, there is a systematic error caused by the nonlinearity of the phase-shifting technique. In this research the absolute optical-thickness distribution of mask blank glass was measured using DFT and wavelength-tuning Fizeau interferometry without using sensitive phase-shifting techniques. The error occurring during the DFT analysis was compensated for by using the unwrapping correlation. The experimental results indicated that the absolute optical thickness of mask glass was measured with an accuracy of 5 nm.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.