Insects exhibit excellent maneuvers such as running and flying despite their small bodies; therefore, their locomotion mechanism is expected to provide a design guideline for micromachines. Numerical simulations have been performed to elucidate this mechanism, whereby it is important to develop a model that is physically identical to the target insect’s parts to reproduce kinematic dynamics. In particular, in flight, the shape and mass of wings, which flap at high frequencies, are significant parameters. However, small insects such as fruit flies have small, thin, and light wings; thus, their mass cannot be easily measured. In this study, we proposed a high-resolution and simple force plate to measure the mass of each part of a tiny insect. The device consists of a circular plate supported by flat spiral springs made of polyimide film, and a laser displacement meter that detects the displacement of the center of the plate. The simple plate fabrication process requires only a couple of minutes. A fabricated force plate with a sub-N/m spring constant achieved a resolution of less than 2 µg. As a demonstration, the wing mass of the fruit flies was measured. The experimental results suggest that the wings accounted for approximately 0.4% of the body mass.

Microforce plates are indispensable tools for quantitatively evaluating the behavior of small objects such as tiny insects or microdroplets. The two main measurement principles for microforce plates are: the formation of strain gauges on the beam that supports the plate and the measurement of the deformation of the plate using an external displacement meter. The latter method is characterized by its ease of fabrication and durability as strain concentration is not required. To enhance the sensitivity of the latter type of force plates with a planar structure, thinner plates are generally desired. However, brittle material force plates that are both thin and large and can be fabricated easily have not yet been developed. In this study, a force plate consisting of a thin glass plate with a planar spiral spring structure and a laser displacement meter placed under the plate center is proposed. The plate deforms downward when a force is exerted vertically on its surface, resulting in the determination of the applied force using Hooke’s law. The force plate structure is easily fabricated by laser processing combined with the microelectromechanical system (MEMS) process. The fabricated force plate has a radius and thickness of 10 mm and 25 µm, respectively, with four supporting spiral beams of sub-millimeter width. A fabricated force plate featuring a sub-N/m spring constant achieves a resolution of approximately 0.01 µN.

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