No abstract

In this work, using our range-resolved interferometry (RRI) signal processing technique, we present a novel approach to multidimensional displacement measurements using only a single optical access port and very simple optical setup. By utilising surface reflections from a stage-mounted moving beamsplitter and two orthogonal stationary reference mirrors, two interferometers for the two Cartesian measurement directions are formed. With RRI, the interferometric phase signals of both interferometers can be independently demodulated, allowing simultaneous measurements of displacement in both dimensions using a single continuous-wave laser diode source and a single photodetector. In this paper, the capabilities of this approach are demonstrated using a proof-of-concept experiment with a multidimensional Piezoelectric stage performing a variety of stage movements. Measurements of displacements over a nominal stage working range of ±50µm are presented, demonstrating independent, simultaneous displacement measurements of two dimensions. The presented measurements show nanometer-level displacement resolutions with typical noise densities of 0.02 nm/√Hz over a 21 kHz bandwidth. It is thought that this approach could offer an interesting alternative to existing interferometric techniques for multi-dimensional metrology, benefiting from both simplicity and cost-effectiveness whilst maintaining the advantages that make optical techniques attractive to scientific and industrial applications.

In this paper, we present a novel technique for stabilisation of widely wavelength modulated lasers (>100pm) over long time scales, where modulation depths exceed the spectral width of standard reference features, such as gas absorption lines, by over an order of magnitude. The technique operates by controlling the temporal separation between successive appearances of a gas absorption line on the up and down sweeps of a sinusoidal laser wavelength modulation waveform. The influence of the signal distortions introduced by the laser intensity modulation that are associated with laser diode injection current modulation are also addressed. The technique is applied to a range-resolved interferometric system interrogating a Mach-Zehnder interferometer operating in thermally stable conditions, using an absorption feature from a fibre-coupled gas cell as a reference. Proof-ofprinciple measurement results achieved using this technique are presented, demonstrating a notional fractional stability of 3.9×10 −7 without further correction.