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We examined the composition and orientation dependences of the piezoelectric properties by combinatorial sputtering. PbTiO3 and PbZrO3 were simultaneously sputtered to prepare composition gradient Pb(Zr,Ti)O3 (PZT) films on Pt/Ti/Si substrates, and an almost linear composition gradient was observed in a range of Zr/(Zr+Ti) ratios from 0.33 to 0.76. Dielectric and piezoelectric properties attained maximum at the Zr/Ti composition close to the morphotropic phase boundary (MPB), which is consistent with that of PZT ceramics. 100-oriented PZT films showed a higher dielectric constant than the PZT films with the other orientations, while the PZT films with 111 + 100 mixed orientation showed larger values of e 31f. These results suggest that the a-axis orientation is dominant in the 100-oriented PZT films. In this study, we demonstrated that the combinatorial sputtering method enables the precise evaluation of the composition dependence of piezoelectric and dielectric properties.

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