The unique characteristics of ultrafast lasers, such as picosecond and femtosecond lasers, have opened up new avenues in materials processing that employ ultrashort pulse widths and extremely high peak intensities. Thus, ultrafast lasers are currently used widely for both fundamental research and practical applications. This review describes the characteristics of ultrafast laser processing and the recent advancements and applications of both surface and volume processing. Surface processing includes micromachining, microand nanostructuring, and nanoablation, while volume processing includes two-photon polymerization and three-dimensional (3D) processing within transparent materials. Commercial and industrial applications of ultrafast laser processing are also introduced, and a summary of the technology with future outlooks are also given.

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Theoretical and experimental investigations have been made of the three-dimensional microchannel fabrication of photostructurable glass by use of a femtosecond (fs) laser. Generally, a microchannel fabricated inside glass by the scanning focal spot of a fs laser perpendicular to the direction of laser propagation assumes an elliptical shape with a cross section of large aspect ratio. We demonstrate that one can greatly reduce the aspect ratio merely by inserting a slit, which is oriented parallel to the laser's scanning direction, before the focusing lens. Computer simulations show that a more symmetrical pattern is obtained in the vicinity of the focal point with the help of such a slit, owing essentially to a diffraction effect.

The creation of complex three-dimensional (3D) microfluidic systems has attracted significant attention from both scientific and applied research communities. However, it is still a formidable challenge to build 3D microfluidic structures with arbitrary configurations using conventional planar lithographic fabrication methods. Here, we demonstrate rapid fabrication of high-aspect-ratio microfluidic channels with various 3D configurations in glass substrates by femtosecond laser direct writing. Based on this approach, we demonstrate a 3D passive microfluidic mixer and characterize its functionalities. This technology will enable rapid construction of complex 3D microfluidic devices for a wide array of lab-on-a-chip applications.

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