A resonant-type inertial impact linear piezoelectric motor based on coupling of driving and clamping parts was designed and manufactured. The motor mainly includes stator (coupling of driving and clamping parts), mover (slider) and auxiliary parts. The driving part works in the resonant state under the excitation of single harmonic, which mainly realizes the function of reciprocating driving. Similarly, under the single harmonic driving, the clamping part also works in the resonant state to realize the clamping function. Through the coupling between the two parts of the stator, the mover is driven to move continuously in one direction. The inertial impact piezoelectric motor works in the resonant state because of the driving and clamping parts work in the resonant state respectively. Compared with the traditional quasi-static inertial impact motor, this study changes the working state of the inertial impact motor, which is novel. Through the finite element simulation software COMSOL 5.2, the resonant frequency coupling of the driving and the clamping part is consistent. An experimental platform was built to test the motor prototype to verify the feasibility of the principle. The experiment shows that: The maximum speed reaches 78 mm/s when the motor prototype is operated at the frequency of 810 Hz with a preload of 2 N and the working voltage of clamping and driving parts of motor were set at 80 and 220 Vp-p respectively. Meanwhile, the maximum load of the motor prototype can reach 5 N. The minimum resolution of the motor prototype is 4.733 μm.

A resonant inertial impact rotary piezoelectric motor based on a self-clamping structure is designed, assembled, and tested. The designed piezoelectric motor mainly includes a rotor (two vibrators, preload mechanism, and intermediate connection mechanism), a clamping mechanism, and another auxiliary mechanism. The piezoelectric ceramic sheet on the rotor drives the vibrator to swing under the excitation of a single harmonic wave. Because there is a clamping mechanism formed by the combination of clamp baffle and fixed clamp ring, thus the half-cycle resonant rotation of the rotor can be effectively completed, and repeated harmonic excitation can realize the unidirectional continuous rotation and swing of the rotor. The whole excitation process of the motor is in a resonance state, which has significant advantages, such as low friction and simple structure, compared with the traditional quasi-static piezoelectric motor. The structure of the piezoelectric motor is designed and analyzed using COMSOL5.5 software and then the motor performance is tested and analyzed by building an experimental platform to verify the feasibility of the motor design. The final experimental results show that the optimal working frequency of the piezoelectric motor is 150 Hz, which is consistent with the characteristic frequency of the simulation. When the motor prototype is under the conditions of optimal operating frequency 150 Hz, voltage 240 Vp-p, and preload torque 7.8 N.mm, the maximum angular speed can reach 2.4 rad/s, the maximum load can reach 27.8 N mm and the maximum resolution of the movement angle can reach 0.941°.