Femtosecond laser fabrication has grown to be a major method of extreme manufacturing because of the extreme energy density and spatial and temporal scales of femtosecond lasers. The physical effects and the mechanism of interaction between femtosecond lasers and materials are distinct from those in traditional processes. The nonlinear and nonequilibrium effects of the interaction have given rise to new concepts, principles, and methods, such as femtosecond pulse durations are shorter than many physical/chemical characteristic times, which permits manipulating, adjusting, or interfering with electron dynamics. These new concepts and methods have broad application prospects in micro/nanofabrication, chemical synthesis, material processing, quantum control, and other related fields. This review discusses the cutting-edge theories, methods, measurements, and applications of femtosecond lasers to micro/nano-manufacturing. The key to future development of femtosecond laser manufacturing lies in revealing its fabrication mechanism from the electronic level and precisely regulating the electronic dynamics.

Dielectric metasurfaces can achieve flexible beam manipulations. Herein, we study dielectric metasurfaces with different refractive indices, periods, incident angles, and cross-sectional shapes to determine the metasurface working mechanisms. Perfect transmission mainly depends on multipolar interference that can be used to control the transmission modes through the hybrid periods, hybrid cross sections, and multilayers. Perfect reflection is strongly influenced by the period of the metasurface and occurs only when the period is shorter than incident wavelength, which can be attributed to the lattice coupling. Furthermore, lattice coupling can be classified into two types with distinct properties: vertical mode and horizontal mode coupling. The vertical mode appears when the effective wavelength matches the feature size, whereas the horizontal mode only appears when the incident wavelength is close to the period. The horizontal mode is sensitive to the incident angle. The revealed functioning mechanisms enable further practical applications of metasurfaces.

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In this study, femtosecond laser double pulses were tested to improve their nickel ablation efficiency. The experimental results indicated that compared with single pulses, double pulses with different delay times generated craters with larger diameters and depths. The results obtained for three sets of double pulses with different energy ratios indicated that double pulses with an energy ratio of 1:9 had the highest ablation efficiency, followed by those with energy ratios of 2:8 and 5:5. The double pulses with the aforementioned three energy ratios achieved the maximum ablation efficiency when the delay time was 3–4 ps. Compared with single pulses, double pulses with an energy ratio of 1:9 generated craters with an up to 34% greater depth and up to 14% larger diameter. In addition, an interference effect was observed with a double pulse delay time of 0 ps, which has seldom been reported in the literature. The double pulses were simulated using the two-temperature model. The simulation results indicated that double pulses with an energy ratio of 1:9 with a delay time of 4 ps can perform the strongest ablation. These simulation results are in line with the experimental results.