The rapid detection of biological and chemical substances in real time is particularly important for public health and environmental monitoring and in the military sector. If the process of substance detection to visual reporting can be implemented into a single miniaturized sensor, there could be a profound impact on practical applications. Here, we propose a compact sensor platform that integrates liquid crystals (LCs) and holographic metasurfaces to autonomously sense the existence of a volatile gas and provide an immediate visual holographic alarm. By combining the advantage of the rapid responses to gases realized by LCs with the compactness of holographic metasurfaces, we develop ultracompact gas sensors without additional complex instruments or machinery to report the visual information of gas detection. To prove the applicability of the compact sensors, we demonstrate a metasurface-integrated gas sensor on safety goggles via a one-step nanocasting process that is attachable to flat, curved, and flexible surfaces.

Metalenses have shown a number of promising functionalities that are comparable with conventional refractive lenses. However, current metalenses are still far from commercialization due to the formidable fabrication costs. Here, we demonstrate a low-cost dielectric metalens that works in the visible spectrum. The material of the metalens consists of a matrix-inclusion composite in which a hierarchy satisfies two requirements for the single-step fabrication; a high refractive index and a pattern-transfer capability. We use a UV-curable resin as a matrix to enable direct pattern replication by the composite, and titanium dioxide nanoparticles as inclusions to increase the refractive index of the composite. Therefore, such a dielectric metalens can be fabricated with a single step of UV nanoimprint lithography. An experimental demonstration of the nanoparticle composite-based metalens validates the feasibility of our approach and capability for future applications. Our method allows rapid replication of metalenses repeatedly and thereby provides an advance toward the use of metalenses on a commercial scale.

Printable metalenses composed of a silicon nanocomposite are developed to overcome the manufacturing limitations of conventional metalenses. The nanocomposite is synthesized by dispersing silicon nanoparticles in a thermally printable resin, which not only achieves a high refractive index for high-efficiency metalenses but also printing compatibility for inexpensive manufacturing of metalenses. The synthesized nanocomposite exhibits high refractive index >2.2 in the nearinfrared regime, and only 10% uniform volume shrinkage after thermal annealing, so the nanocomposite is appropriate for elaborate nanofabrication compared to commercial high-index printable materials. A 4 mm-diameter metalens operating at the wavelength of 940 nm is fabricated using the nanocomposite and one-step printing without any secondary operations. The fabricated metalens verifies a high focusing efficiency of 47%, which can be further increased by optimizing the composition of the nanocomposite. The printing mold is reusable, so the large-scale metalenses can be printed rapidly and repeatedly. A compact near-infrared camera combined with the nanocomposite metalens is also demonstrated, and an image of the veins underneath human skin is captured to confirm the applicability of the nanocomposite metalens for biomedical imaging.

This work presents a facile nanocasting technique to fabricate dielectric metasurfaces at low cost and high throughput. A flexible polymer mold is replicated from a master mold, and then the polymer mold is used to shape particle-embedded UV-curable polymer resin. The polymer mold is compatible with flexible and curved substrates. A hard-polydimethylsiloxane improves mechanical stability of the polymer mold providing sub-100 nm patterning resolution. The patterned resin itself can work as a metasurface without secondary operations because dielectric particles sufficiently increase the refractive index of the resin. The absence of the secondary operations allows our method to have higher productivity and cost competitiveness than those of typical nanoimprint lithography. Experimental demonstration verifies the feasibility of our method, and the replicated metasurface exhibits a conversion efficiency of 46% in the visible, which is comparable to metasurfaces based on low-loss dielectrics. Given that conventional dielectric metasurfaces have been fabricated by electron beam lithography at formidable cost due to low throughput, our method will be a promising nanofabrication platform and thereby facilitate commercialization of dielectric metasurfaces.

We report a new patterning method, called light-stamping lithography (LSL), that uses UV-induced adhesion of poly(dimethylsiloxane) (PDMS). LSL is based on the direct transfer of the contact surface of the PDMS stamp to a substrate via a UV (254 nm)-induced surface bonding between the stamp and the substrate. This procedure can be adopted in automated printing machines that generate patterns with a wide range of feature sizes on diverse substrates. To demonstrate its usefulness, the LSL method was applied to prepare several PDMS patterns on a variety of substrates. The PDMS patterns were then used as templates for selective deposition of TiO2 thin film using atomic layer deposition as well as resists for selective wet etching.