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Zinc oxide (ZnO) simultaneously exhibits semiconducting and piezoelectric properties. ZnO in the form of nanorods has been studied intensively for application in self-powering devices. The power generation in piezoelectric nanogenerators based on ZnO nanorods can be improved via several approaches, including an oxygen plasma treatment. When ZnO nanorods are exposed to oxygen plasma, the charge carrier concentration decreases and the piezoelectric output voltage consequently increases. However, the effects of oxygen plasma on the mechanical properties of ZnO nanorods has not been systematically studied using a precise measurement technique. Given the size of ZnO nanorods, atomic force microscopy (AFM) is a suitable method for manipulating individual ZnO nanorods and measuring their elastic properties. In the present work, we observed the effects of oxygen plasma on the elemental composition and microstructure of ZnO nanorods. First of all, the surface roughness of the ZnO nanorods was analyzed using AFM, revealing that it increased due to the etching effect of the oxygen plasma. From X-ray photoelectron spectroscopy (XPS) measurements, three distinct peaks corresponding to lattice oxygen, oxygen vacancies, and absorbed oxygen on the surface were identified. The XPS analysis results showed that oxygen vacancy defects on the ZnO nanorods were decreased by oxygen plasma treatment. Next, the effects of oxygen plasma on the elastic properties of ZnO nanorods were studied using lateral force microscopy. It was confirmed that the elastic modulus of ZnO nanorods increased due to the reduced number of defects originating from oxygen vacancies.