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Various categories of bonding technologies were investigated for MEMS encapsulation applications. The bonding processes presented in this paper include Al to Al, Si to Si, and metal (Al or Au) to Si. Among the above different bonding schemes, the Al to Al bonding gave the highest process yield and bond strength. In addition, actual MEMS accelerometers were successfully integrated with Al to Al bonding with high yield all the way through plastic over-mold packaging and assembly.

Different from most of the previous studies using light or photons, we use highly charged ions as projectiles to activate proton migration in the smallest saturated and unsaturated hydrocarbon molecules, i.e., CH4 and C2H2. The H3+ formation channel (H3+ + CH+) and isomerization channel (C+ + CH2+), serving as indicators of proton migration, are observed in the fragmentation of CH4 and C2H2 dications. Corresponding kinematical information, i.e., kinetic energy release, is for the first time obtained in the collisions with highly charged ions. In particular, for the C+ + CH2+ channel, a new pathway is identified, which is tentatively attributed to the isomerization on high-lying states of acetylene dication. The kinetic energy release spectra for other two-body breakup channels are also determined and precursor dication states could thus be identified.

Abstract:We have fabricated surface plasmon modulated nanoaperture vertical-cavity surface-emitting lasers (VCSELs) from common 850 nm VCSELs using focus ion beam etching with Ga + ion source. The far-field output power is about 0.3 mW at a driving current of 15 mA with a sub-wavelength aperture surrounded by concentric periodic grooves. The enhancement of transmission intensity can be explained by diffraction and enhanced fields associated with surface plasmon. This structure also exhibits beaming properties.Nano-aperture SEM photograph of a nano-aperture surrounded by concentric periodic grooves