No abstract

Based on electrostatic micro-actuator, energy method is used to analyses its static and dynamic Pull-in mechanism. In addition, the model of electrostatic micro-actuator perforated-plate is used for example analysis to derive its dynamic Pull-in parameter without and with considering squeeze damping effect. By comparing the parameter values from MATLAB calculation and ANSYS simulation under the two circumstances mentioned above, the effects of damping ratio on Pull-in parameter can be obtained. The results show that, the dynamic Pull-in displacement is more than the static Pull-in displacement. And with the existence of squeeze damping effect, Pull-in voltage will increase. When the damping ratio reaches a certain extent, the dynamic Pull-in voltage value will be as large as the static Pull-in voltage value.