Low-temperature atomic layer deposition (ALD) of TiO2, SiO2, and Al2O3 was applied to modify the surface and to tailor the diameter of nanochannels in etched ion-track polycarbonate membranes. The homogeneity, conformity, and composition of the coating inside the nanochannels are investigated for different channel diameters (18-55 nm) and film thicknesses (5-22 nm). Small angle x-ray scattering before and after ALD demonstrates conformal coating along the full channel length. X-ray photoelectron spectroscopy and energy dispersive x-ray spectroscopy provide evidence of nearly stoichiometric composition of the different coatings. By wet-chemical methods, the ALD-deposited film is released from the supporting polymer templates providing 30 μm long self-supporting nanotubes with walls as thin as 5 nm. Electrolytic ion-conductivity measurements provide proof-of-concept that combining ALD coating with ion-track nanotechnology offers promising perspectives for single-pore applications by controlled shrinking of an oversized pore to a preferred smaller diameter and fine-tuning of the chemical and physical nature of the inner channel surface.
A new two‐dimensional (2D) germanium dioxide film has been prepared. The film consists of interconnected germania tetrahedral units forming a bilayer structure, weakly coupled to the supporting Pt(111) metal‐substrate. Density functional theory calculations predict a stable structure of 558‐membered rings for germania films, while for silica films 6‐membered rings are preferred. By varying the preparation conditions the degree of order in the germania films is tuned. Crystalline, intermediate ordered and purely amorphous film structures are resolved by analysing scanning tunnelling microscopy images.
The detailed structure of silica and germania films supported on Ru(0001) metal substrates are compared to each other. Surface science techniques together with density functional theory calculations have been used to gain insights into the atomic arrangement of these prominent glass-forming materials. The monolayer films of these materials both show predominantly crystalline hexagonal lattices with characteristic domain boundary structures. For the germania monolayer films a large variety of ring elements within domain boundaries have been observed. Density functional calculations predict stronger interaction with the metal substrate for bilayer germania as compared to bilayer silica films. Scanning tunneling microscopy images with atomically resolved structural features have given access to silica and germania bilayer film structures. Both bilayer films form characteristic amorphous ring structures. However, the germania bilayer films appear to be more corrugated, pointing to a stronger interaction with the metal support thus giving rise to slightly different connectivity rules.
The present review reports on the preparation and atomic‐scale characterization of the thinnest possible films of the glass‐forming materials silica and germania. To this end state‐of‐the‐art surface science techniques, in particular scanning probe microscopy, and density functional theory calculations have been employed. The investigated films range from monolayer to bilayer coverage where both, the crystalline and the amorphous films, contain characteristic XO4 (X=Si,Ge) building blocks. A side‐by‐side comparison of silica and germania monolayer, zigzag phase and bilayer films supported on Mo(112), Ru(0001), Pt(111), and Au(111) leads to a more general comprehension of the network structure of glass former materials. This allows us to understand the crucial role of the metal support for the pathway from crystalline to amorphous ultrathin film growth.
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