Reducing N2O induced cross-talk in a NDIR CO2 gas sensor for breath analysis using multilayer thin film optical interference coatings. Surface and Coatings Technology, 336, 9-16.
Optical properties of low-temperature pulsed DC-sputter deposited (
≤
70
°
C
) hydrogenated carbon are presented. Increasing hydrogen incorporation into the sputter deposited carbon significantly decreases infrared optical absorption due to a decrease in deep absorptive states associated with dangling bonds. Hydrogen flow is optimized (hydrogen flow 3 sccm), achieving the best compromise between increased infrared transmittance and hardness for durable coating performance. Optical, environmental, and durability performance of pulsed DC-sputtered carbon incorporated in multilayer (a-C:H/Ge) infrared antireflective coatings indicates suitability as a durable infrared optical coating for commonly used infrared substrates, including temperature sensitive chalcogenide glass.
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