Aluminium-doped zinc oxide (AZO) ceramic green compacts at a size of 170 × 340 × 17 mm have been prepared by slip casting. An AZO slurry with good fluidity and viscosity was obtained when 1.2 wt% of dispersant was added, which indicates that the slurry prepared with micrometre particles is more suitable for slip casting. The densification and electrical properties of the AZO targets prepared by particles with different sizes were investigated after sintering from 1380 to 1460°C. The results showed that the relative density of the AZO target prepared with 45 nm particles could reach nearly 98% at 1380°C; the resistivity of the AZO target prepared with nanometre particles could be as low as 1.6 × 10−3 Ω·cm at 1400°C; and the average transmittance of the AZO film prepared with nanometre particles could reach a maximum value of 93.73% in the visible region at 250 W. In this study, the correlation between the density, resistivity, and grain growth of AZO ceramic green compacts was studied.

We simulated the microwave sintering of ZnO by 3D modelling. A large-size Al-doped ZnO (AZO) green ceramic compact was prepared by slurry casting. Through studying the microwave and electric hybrid sintering of the green compact, a relative density of up to 98.1% could be obtained by starting microwave heating at 1200°C and increasing the power 20 min later to 4 kW for an AZO ceramic target measuring 120 × 240 × 12 mm. The resistivity of AZO targets sintered with microwave assistance was investigated. The energy consumption of sintering could be greatly reduced by this heating method. Until now, few studies have been reported on the microwave and electric hybrid sintering of large-size AZO ceramic targets. This research can aid in developing sintering technology for large-size high-quality oxide ceramic targets.