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In this paper, a novel method for simultaneous measurement of rotation speed and vibration based on self-mixing speckle interference (SMSI) has been demonstrated. In view of the autocorrelation characteristic of SMSI, the time delay of laser incident during one rotation period is determined, and the rotation speed of the object is calculated according to the mathematical relationship. At the same time, the signal square-wave conversion and the global maximum fringe-counting method are proposed to measure the vibration displacement subject to the rotation. The theory and signal processing means are introduced in detail, and a series of experiments employing computer disk at different positions with various rotation speeds indicate that the proposed method achieves a simple, efficient, and accurate multi-parameter measurement.

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A novel method called even-power phase modulation is proposed in a self-mixing displacement sensor to improve measuring accuracy, to the best of our knowledge, which is realized by combining the even-power fast algorithm with the sinusoidal phase-modulation method. By performing the even-power fast algorithm in the self-mixing interference system, the spectrum of harmonic components is broadened. In this case, the extracted first and second harmonic components in the frequency domain contain rich information, and the displacement of the target can be accurately reconstructed. The principle and signal processing approach are introduced in detail, and the simulation results show that the reconstruction error can be effectively reduced compared with the electro-optic modulator phase modulation method. A series of experiments at different vibration amplitudes is conducted to confirm the feasibility and effectiveness of the method. An amplitude of 120 nm is proved to be measurable, and the absolute error is 10 nm, which shows great potential in the field of non-contact nanometer vibration measurement sensors.