Femtosecond ultrabright electron sources with spatially structured emission are an enabling technology for free-electron lasers, compact coherent X-ray sources, electron diffractive imaging, and attosecond science. In this work, we report the design, modeling, fabrication, and experimental characterization of a novel ultrafast optical field emission cathode comprised of a large (>100,000 tips), dense (4.6 million tips·cm(-2)), and highly uniform (<1 nm tip radius deviation) array of nanosharp high-aspect-ratio silicon columns. Such field emitters offer an attractive alternative to UV photocathodes while providing a direct means of structuring the emitted electron beam. Detailed measurements and simulations show pC electron bunches can be generated in the multiphoton and tunneling regime within a single optical cycle, enabling significant advances in electron diffractive imaging and coherent X-ray sources on a subfemtosecond time scale, not possible before. At high charge emission yields, a slow rollover in charge is explained as a combination of the onset of tunneling emission and the formation of a virtual cathode.

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Strong-field photoemission from silicon field emitter arrays is investigated experimentally and results are explained using a "simple-man" optical-field emission model. Spectra are collected throughout an in-situ laser annealing process, leading to a red-shift in emitted electron energy along with an increase in electron yield. After the annealing process, a high energy plateau is formed which is explained through optical-field emission along with electron re-scattering with the tip surface.

This paper reports the design, fabrication, and experimental characterization of a fully microfabricated planar array of externally fed electrospray emitters that produces heavy molecular ions from the ionic liquids EMI-BF 4 and EMI-Im. The microelectromechanical systems (MEMS) electrospray array is composed of the following two microfabricated parts: 1) an emitter die with as many as 502 emitters in 1.13 cm 2 and 2) an extractor component that provides assembly alignment, electrical insulation, and a common bias voltage to the emitter array. The devices were created using Pyrex and silicon substrates, as well as microfabrication techniques such as deep reactive ion etching, low-temperature fusion bonding, and anodic bonding. The emitters are coated with black silicon, which acts as a wicking material for transporting the liquid to the emitter tips. The extractor electrode uses a 3-D MEMS packaging technology that allows hand assembly of the two components with micrometer-level precision. Experimental characterization of the MEMS electrospray array includes current-voltage characteristics, time-of-flight mass spectrometry, beam divergence, and imprints on a collector. The data show that with both ionic liquids and in both polarities, the electrospray array works in the pure ionic regime, emitting ions with as little as 500 V of bias voltage. The data suggest that the MEMS electrospray array ion source could be used in applications such as coating, printing, etching, and nanosatellite propulsion.