The paper presents the results of studying the microstructure and elemental composition of multicomponent systems based on silicon, titanium and zirconium dioxides. These systems are of great practical interest for the medical, food, and microbiological industries due to their unique optical, photocatalytic, and bactericidal properties. Studies have shown that multicomponent systems based on silicon, titanium, and zirconium dioxides obtained by the solgel method have an amorphous structure, while the samples exhibit a deviation from stoichiometry towards an increase in the oxygen content, which is explained by the presence of oxo-, hydroxo-, and aqua complexes. The structure and shape of multicomponent oxide particles are determined by the component that prevails in the system. The presence of additional components and possible chemical interactions between them determines the process of nucleation, which, in turn, affects the polydispersity of the obtained samples.

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