We describe the fabrication and the performance of a microcoil-based probe for electron spin resonance (ESR) spectroscopy on micrometer sized samples. The probe consists of a 100 μm planar microcoil fabricated on a glass substrate, tuned and matched at 1.4 GHz (L band) using miniaturized ceramic capacitors. We performed continuous wave ESR experiments on samples having a volume between (100 μm)3 and (10 μm)3. At 300 K, we achieved a spin sensitivity of about 1010 spins/G Hz1/2, which is comparable to that of commercial ESR spectrometers operating at 9 GHz (X band). The results reported in this article suggest that microcoil-based probes might represent a valid alternative to conventional microwave cavities for ESR studies of sample of the order of (100 μm)3 and smaller.

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