A chemical-free technique for fabricating submicron complex oxide structures has been developed based on selective epitaxial growth. The crystallinity and hence the conductivity of the complex oxide is inhibited by amorphous SrTiO3 (STO). Using a combination of pulsed laser deposition and electron-beam lithography, amorphous STO barriers are first deposited on a single crystal substrate. A thin film is then deposited on the patterned substrate with the amorphous STO barriers acting to electrically and physically isolate different regions of the film. Since no chemical or physical etchants come in contact with the deposited film, its integrity and stability are preserved. This technique has successfully produced sub-micron YBa2Cu3O 7−δ and La 2/3 Ca 1/3 MnO3 structures.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.