One of the most important diagnostic features of atomic force microscopy is the measurement of mechanical properties of the surface. Among a wide spectra of measuring techniques, the methods utilizing torsional oscillations of the cantilever provide high speed mapping of properties such as the stiffness, adhesion, snap-in force and energy dissipation. In order to perform quantitative measurements, one must determine the spring constant of the cantilever. In this paper, we present the utilization of high-accuracy normal force calibration structures, allowing the procedure to be carried out easily and quickly. Additionally, the results of tests confirming the efficiency of the method are presented.

A review of various kinds of solid tilts sensors, using a free mechanical member for generation of electric-contact (mostly a ball), is presented. Standard and original solutions are discussed. The latest patents are described. A classification of the existing solutions with respect to their sensing principle is proposed. Possible types of the electric/electronic circuits are discussed. Advantages of these sensors are emphasized: mainly optional operation without power supply, resistance to electrostatic discharges, and simplicity of signal processing. Technological details are briefly introduced, along with miniaturization prospects. Additionally, liquid tilt sensors are succinctly characterized. The most typical tilt sensing techniques are concisely compared.

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Development of new technologies for micro/nanostructures is connected with introduction of new materials or with application of already existing ones in micro-and nanoscale. Unfortunately material parameters in macroand micro/nanoscale are not the same. For this reason it has become crucial to identify nanomechanical properties of materials commonly used in micro-and nanostructures technology. One of the tests used for that purpose is nanowear test made on the atomic force microscope. However, to obtain quantitative results of measurements, precision calibration step is necessary. In this paper a novel approach to calibration of normal force, which is acting on the tip of an atomic force microscope cantilever, is discussed. Presented method is based on application of known normal force directly on the tip using special test structure. Such an approach allows for measurements of nanowear parameters (force, displacement) with uncertainty better than ±3%. Authors present and discuss different constructions of calibration samples. A comparison of described method with already existing ones is also presented.

Thin silicon oxide films were deposited on polycarbonate (PC) plates in a pulsed dielectric barrier discharge (PDBD) at atmospheric pressure and ambient temperature. The films were deposited from gas mixtures of tetraethoxysilane (TEOS), helium, and oxygen. The effects of gas composition on the deposition rate and on the surface roughness were investigated. It was shown that the oxygen concentration was the only parameter influencing the deposition rate and the roughness of the films. : 81.15.Gh, PACS