A silicon bulk micromachiend accelerometer structure has been fabricated and characterize4 that combines linear and angular sensitivity in a single device. Unlike micromachined gyro-scopes no vibratory motion is involved for the detection of rotation, but the direct effect of linear and angular acceleration is detected by simultaneous monitoring of the displacement and tilt of the seismic mass. One axis of linear arid up to two axes of angular acceleration can be measured This combination has practical relevance for single-point sensing of the complete motion of e.g. a c a r body with a minimum number of sensors in applications like vehicle dynamic control or crash detection.
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