In this paper, a novel betavoltaic (BV) microcell based on semiconducting single-walled carbon nanotube (s-SWCNT) arrays/Si heterojunctions are demonstrated for the first time. The aligned arrays of p-type s-SWCNTs were prepared on n-type silicon to form the p-n heterojunctions as energy conversion by the traditional micro-fabrication process and dielectrophoretic (DEP) technology. The s-SWCNT arrays/Si p-n heterojunction displays better rectification characteristics than the SWCNT-based Schottky junctions such as Au/s-SWCNT/Ti and SWCNTs thin film/Si in our previous works. Under 7.8mCi/cm 2 63 Ni irradiation, the open circuit voltage (V OC ) of 62mV, short current density (J SC ) of 3.8μA/cm 2 , fill factor (FF) of 33.4% and energy conversion efficiency (η) of 9.8% were achieved. The results indicated that this s-SWCNT arrays/Si microcell has a huge potential for application in BV microcells.

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