The deuterium concentration as high as 2 10 20 cm 3 can be incorporated in rapid thermal oxide layers by a process of deuterium prebake and deuterium post oxidation anneal. The deuterium distributed not only at Si/oxide interface but also in the bulk oxide. The deuterium incorporation shows the improvement on soft breakdown characteristics and the interface state density at SiO 2 /Si after stress. The addition of very high vacuum prebake process yields a deuterium concentration of 9 10 20 cm 3 , but also leads to the formation of rough oxide.

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