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Cu 6 PS 5 I-based thin films were deposited onto silicate glass substrates by non-reactive radio frequency magnetron sputtering. The chemical composition of thin films were determined by energy-dispersive X-ray spectroscopy. Electrical conductivity of Cu 6 PS 5 I-based thin films was studied depends on chemical composition. Optical transmission spectra of Cu 6 PS 5 I-based thin films were investigated in the interval of temperatures 77-300 K. Absorption edge spectra and refractive index dispersion were derived from the optical transmission spectra. The variation of the main parameters of Urbach absorption edge and electron-phonon interaction was analysed depends on Cu content in Cu 6 PS 5 Ibased thin films.

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