A low-temperature argon ion milling process has been used to induce growth of c-oriented YBa2Cu3O7 on (001) MgO substrates with the in-plane film axes rotated 45° with respect to those of the substrate, and with respect to those of films grown on untreated regions of the substrate. This process is compatible with standard photolithographic processing, and has been used to produce defined areas of the two orientations on the same substrate. Josephson junctions and dc SQUIDs have been fabricated using the resulting grain boundaries.
Josephson junctions have been made by the evaporation of epitaxial YBa2Cu3O7 over steps etched in (001) MgO. Such junctions differ from those grown on perovskite substrates in that the c-axis of the film grows approximately normal to the local substrate surface, so the junction comprises two tilt grain boundaries. Results are reported for junctions formed by this process which showed Josephson currents at temperatures up to 89 K and resistively shunted junctionlike current-voltage curves. A weak magnetic field applied normal to the substrate gave Fraunhofer patterns indicative of good current uniformity across the junction. The dc SQUIDs show deep modulation, and promising noise performance.
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