Boron carbide is one of the most important non-metallic materials. Amorphous BCx films were synthesized at room temperature by single- and dual-target magnetron sputtering processes. A B4C target and C target were operated using an RF signal and a DC signal, respectively. The effect of using single- and dual-target deposition and process parameters on the chemical bonding and composition of the films as well as their functional properties were characterized by Fourier transform infrared spectroscopy, Raman spectroscopy, X-ray photoelectron spectroscopy, X-ray energy dispersive analysis, X-ray diffraction, ellipsometry, and spectrophotometry. It was found that the film properties depend on the sputtering power and the used targets. EDX data show that the composition of the samples varied from B2C to practically BC2 in the case of using an additional C target. According to the XPS data, it corresponds to the different chemical states of the boron atom. A nanoindentation study showed that the film with a composition close to B2C deposited with the highest B4C target power reached a hardness of 25 GPa and Young’s modulus of 230 GPa. The optical properties of the films also depend on the composition, so the band gap (Eg) of the BCx film varied in the range of 2.1–2.8 eV, while the Eg of the carbon-rich films decreased to 1.1 eV.
For biomedical applications, a number of ceramic coatings have been investigated, but the interactions with the components of living system remain unexplored for oxycarbonitride coatings. While addressing this aspect, the present study aims to provide an understanding of the biocompatibility of novel SiC x N y O z coatings that could validate the hypothesis that such coatings may not only enhance the cell–material interaction by re-endothelialization but also can help to reduce bacterial adhesion and activation of blood cells. This work reports the physicochemical properties, hemocompatibility, endothelialization, and antibacterial properties of novel amorphous SiC x N y O z coatings deposited on commercial pure titanium (Ti) by radiofrequency (RF) magnetron sputtering at varied nitrogen (N2) flow rates. A comparison is made with diamond-like carbon (DLC) coatings, which are clinically used. The surface roughness, surface wettability, nanoscale hardness, and surface energy of SiC x N y O z coatings were found to be dependent on the nitrogen (N2) flow rate. Importantly, the as-deposited SiC x N y O z coatings exhibited much better nanoscale hardness and scratch resistance than DLC coatings. Furthermore, Raman spectroscopy analysis of the SiC x N y O z coating deposited on Ti showed a change in the graphitic/disordered carbon content. Cytocompatibility and hemocompatibility properties of the as-deposited SiC x N y O z coating were evaluated using the Mus musculus lymphoid endothelial cell line (SVEC4-10) and rabbit blood in vitro. WST-1 assay analysis showed that these coatings, when compared to DLC, exhibited a better proliferation of endothelial cells, which can potentially result in improved surface endothelialization. Furthermore, qualitative and quantitative analyses of immunofluorescence images revealed a dense cellular layer of SVEC4-10 on SiC x N y O z coatings, deposited at 15 and 30 sccm nitrogen flow rates. As far as compatibility with rabbit blood is concerned, the hemolysis of the SiC x N y O z coatings was less than 4%, with slightly lower values for coatings deposited without N2 flow. The SiC x N y O z coatings support less platelet adhesion and aggregation, with no signature of morphological deformation, as compared to the uncoated titanium substrate or DLC coatings. Furthermore, SiC x N y O z coatings were also found to be effectively extending the blood coagulation time for a period of 60 min. The antimicrobial study of as-deposited SiC x N y O z coatings on E. coli and S. aureus bacteria revealed the effective inhibition of bacterial proliferation after 24 h of culture. An attempt has been made to explain the cyto- and hemocompatibility properties with antimicrobial efficacy of coatings in terms of the variation in the coating composition and surface energy. Taken together, we conclude that SiC1.3N0.76O0.87 coating having a roughness of 17 nm and a surface free energy of 54.0 ± 0.7 mN/m can exhibit the best combination of hardness, elastic modulus, scratch resistance, cytocompatibility...
Amorphous hydrogenated silicon carbonitride films were synthesized on Si(100), Ge(111), and fused silica substrates using the inductively coupled plasma chemical vapor deposition technique. 1,1,3,3-tetramethyldisilazane (TMDSN) was used as a single-source precursor. The effect of the precursor’s pressure in the initial gas mixture, the substrate temperature, the plasma power, and the flow rate of nitrogen gas as an additional reagent on the film growth rate, element composition, chemical bonding, wettability of film surface, and the optical and mechanical properties of a-SiCxNy:H films was investigated. In situ diagnostic studies of the gas phase have been performed by optical emission spectroscopy during the film deposition process. The long-term stability of films was studied over a period of 375 days. Fourier-transform infrared (FTIR) and X-ray energy dispersive spectroscopy (EDX), and wettability measurements elucidated the oxidation of the SiCxNy:H films deposited using TMDSN + N2 mixture. Films obtained from a mixture with argon had high stability and maintained the stability of element composition after long-term storage in ambient air.
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