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The effects of anisotropy of the photoionization cross-section and elastic scattering of photoelectrons in solids are investigated for angle-resolved XPS spectra (ARXPS) recorded from a-Al 2 O 3 substrate in parallel data acquisition mode. It is shown that for quantitative analysis of ARXPS spectra recorded in parallel data acquisition mode it is essential to account for the anisotropies of the photoionization cross-sections of the detected photoelectrons for the concerned elements in the solid due to variation of the angle between the incident x-rays and the detected photoelectrons. Neglecting the effect of elastic scattering only leads to minor errors in quantitative analysis of the ARXPS spectra. By adopting experimentally determined values for the relative sensitivity factors of the concerned photoelectrons in the solid as a function of the detection angle, cumbersome corrections for the effects of anisotropy of the photoionization cross-section and elastic scattering can be avoided.

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