A new method of capacitance measurement for electrical capacitance tomography is presented. A single-shot excitation is used to accelerate measurement. A high-voltage pulse and oversampling of received signal are applied to obtain an acceptable signal-to-noise ratio. The results of measurements of standard capacitors and mutual capacitance of electrodes in 16 electrode tomographic sensors are presented. The elaborated circuit is stray-immune. It can measure capacitance in a range from about 1 fF to 1 pF at one gain setting with good linearity and precision at the rate of 20 000 samples per second.
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