Nanocrystalline Finemet-based alloys Fe 73.5−x M x Nb 3−y RE y Cu 1 Si 13.5 B 9 (M = Al, RE= Nd, Pr, Gd) in the form of amorphous ribbons prepared by melt-spinning technique and thin films prepared by flash or sputtering techniques were investigated. We have paid attention to the influence of substitutions on crystallization and magnetic properties of the samples. The influence of film thickness and annealing temperature on the structure and magnetic properties of finemetic thin films were studied. Nb and Fe were replaced by rare-earth atoms and Al in Finemet, respectively.