In many medical and industrial applications, some strategies are needed to control the adhesion forces between the materials, because surface forces can activate or hinder the function of the device. All actual surfaces present some levels of roughness and the contact between two surfaces is transferred by the asperities on the surfaces.The force of the adhesion, which depends on the operating situations, can be influenced by the contact region. The aim of the present study is to predict the adhesion force in MEMS surfaces using the JKR and DMT models. The surfaces of the coating material in this research consisted of the single-layer coating of Gold and Silver, and the double-layer coating of TiO 2 /Gold and TiO 2 /Silver on the silicon (100) substrates.The depositing was done by the thermal evaporation method. The results showed that the double-layer coating developed by the new deposition method helped the reduction of the adhesion forces between the probe tip and the specimen surface.The predicted adhesion forces between the probe and the specimens with DMT and JKR models were compared with the experimental results. For all specimens, the simulated data by applying the JKR theory were in a good agreement with the adhesion force experimental values.

Adhesion force is one of the most important factors in microelectromechanical systems (MEMS), especially for microassembly. It depends on operating conditions and is affected by the contact area. In this study, the adhesion force between MEMS materials and AFM tips was analysed using AFM's point-mode spectroscopy. The aim was to study the effectiveness of various coatings in MEMS adhesion surfaces.For this purpose, five silicon surfaces were used, four of which were coated, and one was noncoated. Two of them were deposited by single-layer coating (Au and Ag). The other two were deposited by double-layer coating (TiO 2 /Au, TiO 2 /Ag) on a Si (1 0 0) substrate. The depositing was accomplished by the thermal evaporation method. Composite materials and analysis were reviewed by observing the SEM image. The experimental results showed that the method of deposition helped to decrease the adhesion force between the probe tip and the surface of the specimens, and double-layer coating had stronger effect on decreasing the adhesion force than the single-layer coating.