In order to fully understand nanoscale heat transport it is necessary to spectrally characterize phonon transmission in nanostructures. Toward this goal we have developed a microfabricated phonon spectrometer. We utilize microfabricated superconducting tunnel junction (STJ)-based phonon transducers for the emission and detection of tunable, non-thermal and spectrally resolved acoustic phonons, with frequencies ranging from ∼100 to ∼870 GHz, in silicon microstructures. We show that phonon spectroscopy with STJs offers a spectral resolution of ∼15-20 GHz, which is ∼20 times better than thermal conductance measurements, for probing nanoscale phonon transport. The STJs are Al-Al x O y -Al tunnel junctions and phonon emission and detection occurs via quasiparticle excitation and decay transitions that occur in the superconducting films. We elaborate on the design geometry and constraints of the spectrometer, the fabrication techniques and the low-noise instrumentation that are essential for successful application of this technique for nanoscale phonon studies. We discuss the spectral distribution of phonons emitted by an STJ emitter and the 3 Current address:
Thermal transport in nanostructures is strongly affected by phonon-surface interactions, which are expected to depend on the phonon's wavelength and the surface roughness. Here we fabricate silicon nanosheets, measure their surface roughness (∼ 1 nm) using atomic force microscopy (AFM), and assess the phonon scattering rate in the sheets with a novel technique: a microscale phonon spectrometer. The spectrometer employs superconducting tunnel junctions (STJs) to produce and detect controllable nonthermal distributions of phonons from ∼ 90 to ∼ 870 GHz. This technique offers spectral resolution nearly 10 times better than a thermal conductance measurement. We compare measured phonon transmission rates to rates predicted by a Monte Carlo model of phonon trajectories, assuming that these trajectories are dominated by phonon-surface interactions and using the Ziman theory to predict phonon-surface scattering rates based on surface topology. Whereas theory predicts a diffuse surface scattering probability of less than 40%, our measurements are consistent with a 100% probability. Our nanosheets therefore exhibit the so-called "Casimir limit" at a much lower frequency than expected if the phonon scattering rates follow the Ziman theory for a 1 nm surface roughness. Such a result holds implications for thermal management in nanoscale electronics and the design of nanostructured thermoelectrics.
Ca3Co4O9 thin films synthesized through solution processing are shown to be high-performing, p-type transparent conducting oxides (TCOs). The synthesis method is a cost-effective and scalable process that consists of sol-gel chemistry, spin coating, and heat treatments. The process parameters can be varied to produce TCO thin films with sheet resistance as low as 5.7 kΩ/sq (ρ ≈ 57 mΩ cm) or with average visible range transparency as high as 67%. The most conductive Ca3Co4O9 TCO thin film has near infrared region optical transmission as high as 85%. The figure of merit (FOM) for the top-performing Ca3Co4O9 thin film (151 MΩ−1) is higher than FOM values reported in the literature for all other solution processed, p-type TCO thin films and higher than most others prepared by physical vapor deposition and chemical vapor deposition. Transparent conductivity in misfit layered oxides presents new opportunities for TCO compositions.
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