Processing of materials by ultrashort laser pulses has evolved significantly over the last decade and is starting to reveal its scientific, technological and industrial potential. In ultrafast laser manufacturing, optical energy of tightly focused femtosecond or picosecond laser pulses can be delivered to precisely defined positions in the bulk of materials via two-/multi-photon excitation on a timescale much faster than thermal energy exchange between photoexcited electrons and lattice ions. Control of photo-ionization and thermal processes with the highest precision, inducing local photomodification in sub-100-nm-sized regions has been achieved. State-of-the-art ultrashort laser processing techniques exploit high 0.1–1 μm spatial resolution and almost unrestricted three-dimensional structuring capability. Adjustable pulse duration, spatiotemporal chirp, phase front tilt and polarization allow control of photomodification via uniquely wide parameter space. Mature opto-electrical/mechanical technologies have enabled laser processing speeds approaching meters-per-second, leading to a fast lab-to-fab transfer. The key aspects and latest achievements are reviewed with an emphasis on the fundamental relation between spatial resolution and total fabrication throughput. Emerging biomedical applications implementing micrometer feature precision over centimeter-scale scaffolds and photonic wire bonding in telecommunications are highlighted.

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Three-dimensional (3D) micro/nano-structuring of photo-resists is systematically studied at the close-to-dielectric- breakdown irradiance. It is demonstrated that avalanche absorption is playing a major part in free electron generation and chemical bond breaking at these conditions. The steps of photo-initiation and chemical bond breaking in propagation of polymerization are altered as compared with photo-polymerization at low-irradiance and one-photon stereo-lithography. The avalanche dominates radical generation and promotion of polymerization at tight focusing and a high approximately TW/cm(2) irradiance. The rates of electron generation by two-photon absorption and avalanche are calculated for the experimental conditions. Simulation results are corroborated by 3D polymerization in three resists with different photo-initiators at two different wavelengths and pulse durations. The smallest feature sizes of 3D polymerized logpile structures are consistent with spectral dependencies of the two photon nonlinearities. Implications of these findings for achieving sub-100 nm resolution in 3D structuring of photo-polymers are presented.

The natural cell environment is characterised by complex three-dimensional structures, which contain features at multiple length scales. Many in vitro studies of cell behaviour in three dimensions rely on the availability of artificial scaffolds with controlled three-dimensional topologies. In this paper, we demonstrate fabrication of three-dimensional scaffolds for tissue engineering out of poly(ethylene glycol) diacrylate (PEGda) materials by means of two-photon polymerization (2PP). This laser nanostructuring approach offers unique possibilities for rapid manufacturing of three-dimensional structures with arbitrary geometries. The spatial resolution dependence on the applied irradiation parameters is investigated for two PEGda formulations, which are characterized by molecular weights of 302 and 742. We demonstrate that minimum feature sizes of 200 nm are obtained in both materials. In addition, an extensive study of the cytotoxicity of the material formulations with respect to photoinitiator type and photoinitiator concentration is undertaken. Aqueous extracts from photopolymerized PEGda samples indicate the presence of water-soluble molecules, which are toxic to fibroblasts. It is shown that sample aging in aqueous medium reduces the cytotoxicity of these extracts; this mechanism provides a route for biomedical applications of structures generated by 2PP microfabrication and photopolymerization technologies in general. Finally, a fully biocompatible combination of PEGda and a photoinitiator is identified. Fabrication of reproducible scaffold structures is very important for systematic investigation of cellular processes in three dimensions and for better understanding of in vitro tissue formation. The results of this work suggest that 2PP may be used to polymerize poly(ethylene glycol)-based materials into three-dimensional structures with well-defined geometries that mimic the physical and biological properties of native cell environments.

The femtosecond laser-induced multi-photon polymerization of a zirconium–silicon based sol–gel photopolymer was employed for the fabrication of a series of micro-optical elements with single and combined optical functions: convex and Fresnel lenses, gratings, solid immersion lenses on a glass slide and on the tip of an optical fiber. The microlenses were produced as polymer caps of varying radii from 10 to 90  µm. The matching of refractive indices between the polymer and substrate was exploited for the creation of composite glass-resist structures which functioned as single lenses. Using this principle, solid immersion lenses were fabricated and their performance demonstrated. The magnification of the composite solid immersion lenses corresponded to the calculated values. The surface roughness of the lenses was below ∼ 30 nm, acceptable for optical applications in the visible range. In addition, the integration of micro-optical elements onto the tip of an optical fiber was demonstrated. To increase the efficiency of the 3D laser polymerization, the lenses were formed by scanning only the outer shell and polymerizing the interior by exposure to UV light.