No abstract

Flexible glass, such as ultra‐slim Corning® Willow® Glass, produced at thicknesses lower than 200 micron has the ability to bend, while maintaining perfect barrier properties, superior surface quality, greater transparency, and high temperature processing, outperforming polymers. At the same time it has the potential to be used in roll‐to‐roll large area processing. These qualities make flexible glass an outstanding material for displays, touch panels, thinfilm batteries and photovoltaic (PV) products.

Niob dotiertes Titanoxid ist ein noch weitestgehend unbekanntes TCO‐Material. Mittels Gleichstrom‐ und Puls‐Magnetron‐Sputtern wurden polykristalline TiO2:Nb‐Schichten in einer produktionsähnlichen Beschichtungsanlage abgeschieden und die Eigenschaften der Schichten untersucht. Eine mittels Gleichstrom gesputterte 100 nm dicke TiO2:Nb‐Schicht zeigt nach einer thermischen Behandlung bei 450 °C einen niedrigen spez. elektr. Widerstand von 7,2 × 10−4 Ωcm, einen Extinktionskoeffizienten von 0,02 und eine Transmission im sichtbaren Spektralbereich von 74,8%.

Ultra-thin 100µm thick flexible glasses with a maximum dimension of 250x300 mm² were deposited with transparent conductive ITO and IZO using in-line magnetron sputtering under pilot scale conditions. The flexible glass was coated at room temperature with ITO and IZO and further refined by dynamic flash lamp annealing (FLA) in the millisecond range. After flashing the films, we achieved an improved transmittance and a reduced sheet resistance of the films. Figure 1. Thin-film coatings on flexible substrates -left side ultra-thin Corning ® Willow ® Glass; right side PET web.

Ultra‐fast thermal annealing of thin films with annealing times of few milliseconds are faster und more energy efficient than conventional furnace annealing methods. By using flash lamp annealing, only the surface is heated while the substrate remains cold. This allows the refinement of indium‐tin‐oxide films on rigid and ultra‐thin flexible glass and improves their conductivity and transmittance.