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An overview of the numerous latest research in microfiber humidity sensors is carried out with a specific focus on measurement methods, humidity sensitive materials, probe structures, and sensing properties of different sensors. First, five mainstream measurement structures, including taper, fiber grating, coupler, resonator, and interferometer are reviewed. It is concluded that these measurement structures sense the physicochemical property variations of microfibers or sensitive films and exhibit the change of optical signal when exposed to environment. Second, the basic preparation methods, humidity‐sensing properties, and their advantages and disadvantages as humidity sensitive material are addressed. Then, the advantages and disadvantages of all the above sensing structures are also discussed and compared. Finally, the main existing problems and potential solutions of microfiber humidity sensors are pointed out.

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