The material fused silica, as well as other brittle-hard materials such as glass ceramics, have great potential for use in a wide range of applications due to their special material properties. The technical advantages of these materials require sophisticated processing technologies, including polishing steps, in order to be able to use these interesting materials advantageously. In addition, a current trend in modern optical manufacturing is the use of free-form surfaces and monolithic components that combine several optical and mechanical functions in one part. Novel or improved processes are needed in order to meet future requirements for resource-saving and effective production methods at the same time.

In the field of optical manufacturing, fused silica has a high and constantly growing application potential. Its material advantages, such as low thermal expansion and high thermal shock resistance, as well as its high transparency from the ultraviolet to the infrared spectral range, result in a large number of application fields. For example, manufacturing processes in semiconductor technology require high-quality quartz materials throughout the wafer handling process to avoid non-permissible contamination and to withstand the high process temperatures. Another example are monolithic components for fiber preform manufacturing, where internal contours with high aspect ratios (e.g. component length to component diameter) and high surface qualities are required to draw fiber types with special properties. The demands on the complexity and accuracy of these components are constantly increasing, which is accompanied by the need to analyse and optimize modern CNC manufacturing techniques more and more. In the following, investigations on the grinding of internal contours with a high aspect ratio are presented, in which the influence of an ultrasonic assistance as well as different machining strategies are considered.

The presented investigations deal with real-time evaluation and recording of vibrations and forces during a CNC grinding process, as well as the analysis and control of process influences on the surface quality of optical components. The experiments were carried out on a 5-axis CNC machine. Rapid subsequent analysis of the topography resulting from grinding is achieved with the aid of white light interferometry. The aim of the investigations is to reduce the surface deviations (roughness, mid-spatials, waviness) influenced by process factors. It is shown that the vibration data measured during the grinding process correlate to a high degree with the recorded topography data.